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</html><description>MEMS (micro-electromechanical system) adalah mesin miniatur yang memiliki komponen mekanik dan elektronik. Dimensi fisik MEMS bisa berkisar dari beberapa milimeter hingga kurang dari satu mikrometer, ukuran yang jauh lebih kecil dari lebar sehelai rambut manusia. Label MEMS digunakan untuk menggambarkan kategori perangkat mikromekatronik sekaligus proses yang digunakan dalam pembuatannya. Beberapa MEMS bahkan tidak memiliki bagian [&hellip;]</description></oembed>
